SUMCO Phoenix Corporation, Albuquerque Facility, 9401 San Mateo Blvd. NE, Albuquerque, New Mexico 87113
SUMCO Phoenix requests a modification to their air quality permit in Application #0444-M6
The applicant is requesting a modification to Permit #0444-M5-1AR. The following updates are being requested with this application:
- Update the permit to include an accurate representation of the number of Chemical Vapor Deposition Units (CVDUs). Previously, CVDU's 12 and 13 were included in the permit but did not have any emissions. Emissions 12 and 13 have been removed with no change in emissions.
- The application is updating the permit to include an accurate representation of chemical usage for Hydrofluoric Acid, Arsine and Phosphine.
- Removal of Nitric Acid and Diborane from the permit. Neither are Hazardous Air Pollutants and should be removed from permit condition 1.F.3) and Table 2a.
- Based on the approved modeling waiver, we request that both humidifiers (units 10 & 11) may operate continuously and simultaneously.
- With this change we request that that permit condition 1.F.4) be removed.
- With this change we request that that permit condition 1.F.6) be removed.
- With this change we request that that permit condition 3.D. be removed.
- With this change we request that that permit condition 4.H. be removed.
- With this change we request that that Table 2b, footnote 2, “Emission Units 10 and 11 are not allowed to operate simultaneously.” be removed.
- We request that Permit condition 2.G. for unit FS1, FS2, and FS3, Acid Exhaust Scrubbers, is updated to reflect current operating conditions for this unit.
- Additionally, we request that the gas flow rate, pH, and pressure drop requirements are removed from Permit condition 2.H.
- A redline version of the current permit that represented the aforementioned changes is included with this application.
Important Dates:
Comment Period Start Date: May 16, 2023
Comment End Date: June 15, 2023
Decision Due Date: August 13, 2023
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